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Tescan MAIA-3 Field Emission Gun Scanning Electron Microscope (FEG-SEM)

High resolution Scanning Electron Microscope  with X-EDS, EBSD, SE, BSE and STEM.

Tescan Maia3 Field Emission Gun
Tescan Maia3 Field Emission Gun


  • High brightness Schottky emitter source for high resolution/high current/low noise imaging. Accelerating voltage 0.01 – 30 kV.
  • Secondary Electron (SE), in-beam SE, low kV backscattered electron (BSE), in-beam BSE and Scanning Transmission EM (STEM) imaging capability.
  • Oxford Instruments X max 80NT SDD Energy Dispersive X-ray detector (X-EDS) for elemental and chemical analysis, mapping and line-scans using Aztec software.
  • Oxford Instruments Nordlys Electron Backscattered Diffraction (EBSD) for crystallographic phase determination and grain boundary characterisation.
  • Variable pressure operation to 500 Pa.
  • Peltier cooled sample stage to -50o C.
  • In chamber plasma cleaner.