Atomic Layer Deposition (ALD)

Brand/model	Beneq, ALD, Thin Film System TFS200.
Manylion	From summer 2019: ALD deposition of TiO2, TiN, Ta2O5, Al2O3, ZnO, SiO2, SiN, NiO, ITO, MoO.
Cyfleuster	Institute for Compound Semiconductors
Ysgol	Yr Ysgol Ffiseg a Seryddiaeth

Cysylltwch

Queen's Buildings
5 The Parade
Heol Casnewydd
CF24 3AA