ICP-RIE Etch tool
| Make/model | Oxford Instruments, PlasmPro 100 Cobra 300. |
|---|---|
| Details | Plasma etch tool - III-V, GaN, SiN etching. |
| Facility | Institute for Compound Semiconductors |
| School | School of Physics and Astronomy |
Get in touch
Stuart Thomas
Location
Queen's Buildings
5 The Parade
Newport Road
CF24 3AA
5 The Parade
Newport Road
CF24 3AA