Evaporator 6

Make/model	BUHLER, Boxer, dielectric evaporator.
Details	With ebeam gun - thermal or e-beam metals- Al, Au, Ti, SiO2. Sputter- SiO2 and SiN.
Facility	Institute for Compound Semiconductors
School	School of Physics and Astronomy

Get in touch

Queen's Buildings
5 The Parade
Newport Road
CF24 3AA