6" mask aligner
| Make/model | SÜSS MicroTec, MA6 Mask Aligner. |
|---|---|
| Details | Photolithographic tool with a 1000W Hg UV lamp. Soft, hard, vacuum and soft-vacuum contact modes. |
| Facility | Institute for Compound Semiconductors |
| School | School of Physics and Astronomy |
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Institute for Compound Semiconductors (ICS)
Location
Queen's Buildings
5 The Parade
Newport Road
CF24 3AA
5 The Parade
Newport Road
CF24 3AA