ICP-RIE Etch tool

Brand/model	Oxford Instruments, PlasmPro 100 Cobra 300.
Manylion	Plasma etch tool - III-V, GaN, SiN etching.
Cyfleuster	Institute for Compound Semiconductors
Ysgol	Yr Ysgol Ffiseg a Seryddiaeth

Cysylltwch

Queen's Buildings
5 The Parade
Heol Casnewydd
CF24 3AA